| | | | | | | | |
| Name | | State or Other Jurisdiction of
Incorporation / Organization |
| DOMESTIC SUBSIDIARIES | | |
| Anchor Semiconductor, Inc. | | California |
| Belize Holdings, LLC | | Delaware |
| Dino Acquisition Technology L.L.C. | | Delaware |
| ECI Technology International, Inc. | | Delaware |
| Front Edge Technology Inc. | | California |
| International Sales & Business, Inc. | | California |
| KLA Aleris Holding, LLC | | Delaware |
| KLA EUVMI, LLC | | Delaware |
| KLA-Tencor Asia-Pac Distribution Corporation | | Delaware |
| KLA-Tencor China Corporation | | California |
| KLA-Tencor International Corporation | | California |
| KT Recreation Association, LLC | | Delaware |
| KT Venture Group II, L.L.C. | | Delaware |
| KT Venture Group, L.L.C. | | Delaware |
| KT Venture Management, L.L.C. | | Delaware |
| Nanomechanics Inc. | | Tennessee |
| VLSI Standards, Inc. | | California |
| Whiskey Holding Sub, LLC | | Delaware |
| Zeta Instruments, Inc. | | Delaware |
| INTERNATIONAL SUBSIDIARIES | | |
| Anchor (Shanghai) Semiconductor Inc. | | Shanghai |
| Capres A/S | | Denmark |
| Frontline P.C.B. Solutions Ltd. | | Israel |
| ICOS Vision Systems (Shenzhen) Co. Ltd. | | China |
| ICOS Vision Systems Corporation | | Belgium |
| ICOS Vision Systems Ltd. | | Hong Kong |
| ICOS Vision Systems NV | | Belgium |
| KLA Corporation UK Ltd | | United Kingdom |
| KLA Corporation UK Holdings Ltd | | United Kingdom |
| KLA Finco Pte. Ltd. | | Singapore |
| KLA-Tencor (Malaysia) Sdn Bhd | | Malaysia |
| KLA-Tencor (Singapore) Pte. Ltd. | | Singapore |
| KLA-Tencor (Thailand) Limited | | Thailand |
| KLA-Tencor Corporation (1992) Ltd. | | Israel |
| KLA-Tencor Corporation (Cayman) Limited, I | | Cayman Islands |
| KLA-Tencor Corporation (Cayman) Limited, III | | Cayman Islands |
| KLA-Tencor Corporation (Israel) | | Israel |
| KLA-Tencor Corporation Holding (1987) Ltd. | | Israel |
| KLA-Tencor France SARL | | France |
| KLA-Tencor GmbH | | Germany |
| KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. | | Israel |
| KLA-Tencor International Trading (Shanghai) Co., Ltd. | | China |
| KLA-Tencor Ireland Ltd. | | Ireland |
| KLA-Tencor Italy S.R.L. | | Italy |